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Scanning Kelvin probe 掃瞄式功函數量測

Ambient Advanced Scanning Kelvin Probe for work function measurment Model: SKP series

Ambient Advanced Scanning Kelvin Probe

  • 3D maps of surface potential and sample topography.
  • Scan area: 50 x 50 mm (最大可到 350 x 350 mm, for 12" wafer)
  • 2mm and 50µm tips. (有其它尺寸或可客制)
  • Work Function resolution 1-3 meV (2mm tip), 5-10 meV (50µm) 
  • Tip to Sample Height Regulation to within 400 nm.

 



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