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SR 系列 反射式膜厚儀

 

Model

Wavelength Range *

Measurable

Parameters**

Measurable

Thickness Range***

Options

SR100

250 to 1100 nm

D / R / N / K

Up to 50 um

T, Mapping

SR300

400 to 1100 nm

D / R / N / K

20 nm to 150 um

T, Mapping

SR400

1000 to 1700 nm

D / R / N / K

50 nm to 100 um

T, Mapping

SR450

400 to 1700 nm

D / R / N / K

20 nm to 150 um

T, Mapping

SR500

250 to 1700 nm

D / R / N / K

Up to 150 um

T, Mapping

* Wavelength range can be customized as low as 190 nm and/or as long as 2500 nm, or with different resolutions. 

** D - Thickness; R - Reflection Spectrum; T - Transmission Spectrum; N - Refractive Index; K - Extinction Coefficients
*** Measurable thickness range is also film properties dependent.

Thickness range for each model could also be configured with different wavelength resolutions

Typical Applications

  •  Solar Films (Si3N4, CdTe, CdS, ZnS, SnOx)...
  • Semiconductor Films
  • Biological Films
  • Photoresist, polyimide, Oxides, Nitrides
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor Compounds
  • Functional films in MEMS/MOEMS
  • Thin film transistors (TFT) stack
  • Conductive oxide: Indium Tin Oxide
  • Coatings on medical devices
  • Amorphous, Nano and Crystalline films
  • Cell Gap



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